Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.
Diaphragm-sealed valves:
- Have long cycle life and provide effective shutoff
- Have actuator options including manual, pneumatic, and locking
- Are offered in a wide variety of sizes, materials, and configurations
Diaphragm-Sealed Valves (DL and DS Series)
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DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications.
DL Series Features
- DL series diaphragm valves require just one-quarter turn of the handle to actuate the valve from fully open to closed
- Position indicator ring provides visual confirmation that the valve is fully open or closed
- Splined handle and actuator prevent handle slippage and assure positive valve actuation
DS Series Features
- DS series diaphragm valves require approximately one and one-half turns to operate from fully open to closed
Specifications
| Type | Swagelok® tube fitting, VCR® face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld |
| Size | 1/4, 3/8, and 1/2 in.; 6 and 8 mm |
Bulk Gas Diaphragm Valve (LD Series)
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With flow coefficients up to 13 and a variety of body materials and configurations, LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.
Features
- Shutoff, bulk-gas distribution, and isolation service
- 1/4 to 1 in. and 12 to 25 mm end connections
- No springs or threads in wetted areas enable cleaner operation
- Contoured flow passages allow high flow
- Tied diaphragm design provides positive stem retraction
Specifications
| Type | Swagelok tube fitting, male VCR face seal fitting, female NPT, female ISO, tube extension |
| Size | 1/4 to 1 in.; 12 to 25 mm |
Springless Diaphragm Valves for High Performance (DP Series)
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With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications.
Features
- Suitable for ultrahigh-purity applications
- 316L VIM-VAR stainless steel body
- Low-pressure and high-pressure models
- VCR®, tube butt weld, and modular surface-mount end connections
- Manual or pneumatic actuation
Specifications
| End Connections |
|
| Type | Swagelok tube fitting, VCR face seal fitting, tube butt weld, modular surface-mount (MSM) |
| Size | 1/4 in.; 6 mm |
High-Flow, Springless Diaphragm Valves (DF Series)
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DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.
Features
- 316L VAR stainless steel body
- No springs or threads in wetted areas improves cleanliness
- 316L VAR stainless steel body
- Fully swept flow path enhances purging and gas replacement
- Minimal PCTFE volume minimizes gas adsorption and desorption
- Fully contained seat insert increases cycle life
Specifications
| Type | "H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld |
| Size | 1/4, 3/8, 1/2 in.; 10 and 12 mm |
Diaphragm Valves for Atomic Layer Disposition (ALD Series)
Shop CatalogSwagelok's ALD diaphragm valves, fulfill your applications needs with an ultrahigh cycle life and high-speed actuation. The ALD series features thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
Features
- Ultrahigh cycle life with high-speed actuation
- Electronic actuator position-sensing option
- Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel body
- VCR®, tube butt weld, and modular surface-mount end connections
Specifications
| Type | VCR face seal fitting, tube butt weld; modular surface mount (MSM) |
| Size | 1/4 to 1/2 in.; 6 to 12 mm; 1.125 and 1.5 in. MSM |
Diaphragm Valves, Ultrahigh-Purity Fluoropolymer (DRP Series)
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Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.
Features
- Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features
- Modified PTFE wetted parts and polypropylene actuator
- Meet SEMI Standard F57-0301 for ultrahigh-purity system components
- Fine thread flare and Nippon Pillar® Super 300 end connections standard; Flowell, space saver, and other end connections available
- Custom manifolds and subassemblies available
Specifications
| Type | Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell |
| Size | 1/4 to 1 1/4 in. and 6 to 25 mm |
| Configuration | 2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models |
Thermal-Immersion Diaphragm Valves
CatalogFeatures
- Swagelok® thermal-immersion diaphragm valves offer high-speed actuation
- Offered in both pneumatically actuated and manual models
- Manual actuation with a lock-out handle
- Fully contained high-purity grade PFA seat
- Fully swept flow path
- Variety of 1/4 and 3/8 in. end connections
Specifications
| Type | VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM) |
| Size |
1/4 and 3/8 in. 1.125 and 1.5 in. MSM |
Radial Diaphragm Valves (DR Series)
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The DR series radial diaphragm valve offers a cleaner, more compact way to manage sterile flow streams for many applications: media preparation, fermentation, harvest, separation, refining, purification, CIP, and SIP systems. The single-body biopharm valve design can be manufactured in a wide range of configurations to include multiple valves and multiple ports, and point-of-use valves.
Features
- 316L stainless steel and modified PTFE wetted parts
- Variety of compact multivalve, multiport configurations
- Choice of sanitary clamp and butt weld end connections
- Choice of pneumatic or manual actuators in plastic or aluminum
- Five sizes from 1/2 to 2 in.
Specifications
| Valve Sizes | 1/2 to 2 in. |
| End Connections | Tube butt weld, TS series sanitary clamp, and Kwik-Clamp |
Springless Diaphragm Valves, 1.125 in., for Modular Gas Systems (DE Series)
Catalog
DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.
Features
- 1.125 in. C-seal and W-seal designs
- Available in two- and three-port configurations
- Compact pneumatic and manual actuators
- Fixed orientation of actuator to body for consistency of installation
- Corner chamfers on outlet side of body for visual indication of flow direction
Specifications
| End Connections |
|
| Type | 1.125 in. modular surface mount (MSM) |
| Configurations | 2-port and 3-port |
"Safe Product Selection:
The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.
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