Our high-performance ALD valves are a key example of how Swagelok has long displayed responsive technical leadership in the semiconductor manufacturing industry. Since introducing the world to ALD valve technology, Swagelok has worked closely with semiconductor industry customers to understand their needs, then create ALD valves that provide the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. .
Features
- Ultrahigh cycle life with high-speed actuation
- Electronic actuator position-sensing option
- Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel body
- VCR®, tube butt weld, and modular surface-mount end connections
- Normally closed and normally open pneumatic actuation
- Two-port straight and elbow configurations
- Two-, three- and four-port multiport valves and multivalve manifolds
CAD Files and Sales Drawings
Choose from more than 1 million Swagelok CAD templates and sales drawings in multi-lingual formats CAD templates are available in a variety of 2D or 3D file formats. Sales drawings are available in .pdf format. Search based on product names or part numbers.
"Safe Product Selection:
The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.
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