Thermal- Immersion Diaphragm Valves
An increasing number of applications today require high precursor temperatures, with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high temperature environment, including the body and actuator. Swagelok® thermal-immersion diaphragm valves offer high-speed actuation and are designed for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.
Features
- Normally closed pneumatic actuation
- Capable of valve opening or closing time of less than 5 ms
- Manual actuation with a lock-out handle
- Fully contained high-purity grade PFA seat provides: - Broad range of chemical compatibility
- Fully swept flow path: - Minimizes entrapment areas
- Valve and actuator fully immersible in a heated chamber
- Offered in both pneumatically actuated and manual models
- Available with a variety of 1/4 and 3/8 in. end connections
- Excellent resistance to swelling and contamination
- Facilitates purging
- Maximizes flow capacity